54:15
演讲嘉宾： KLA Instruments - Jianhui Liang 博士
Posted Thursday, April 15, 2021
46:24
This webinar discusses the use of the Zeta optical profilers and Tencor stylus profilers to address metrology requirements for laser-induced surface features.
Posted Tuesday, April 13, 2021
47:09
Posted Wednesday, November 11, 2020
17:43
Presentation by Rae Zeng from KLA at the USA eUser Group Meeting.
Posted Thursday, October 29, 2020
54:05
Posted Thursday, October 22, 2020
32:08
The first foray into the vast number of applications that optical profilometers serve; measuring step heights (coating thickness, etch depth, etc.). We will cover basic topics such as: sample preparation, best practices for data acquisition, and various methods for calculating a step height. We will also discuss transparent films and step heights for different materials, including metals.
Posted Tuesday, October 20, 2020
51:52
Posted Thursday, September 24, 2020
55:20
Making automated measurements in a production fab requires more than just the capability to measure the feature of interest. The system must have precise measurement results to be able to control the process 24x7. The system must have good matching so that any system used will produce the same measurement results. The system must have seamless recipe transportability so that the recipe can be c...
Posted Tuesday, September 22, 2020
44:02
表面粗糙度表征可以通过多种表面测量技术来实现。这个网络研讨会将介绍一些测量表面粗糙度的技术，以及量化粗糙度的典型方法。此外，我们将探索如何使用3D形貌还有表面形貌和先进的量化方法来加深您对表面形貌的理解。
Posted Thursday, July 9, 2020
28:55
Thin film layers control is extremely important to many technology-based industries. We will look by means of industry examples at two principal optical measurement types; spectral reflectometry and optical profilometry. The aim is to provide you with clarity into the physical working principles, when to use these techniques, and how to apply them to a variety of samples.
Thin-film interferenc...
Posted Sunday, June 28, 2020
59:52
3D Surface Roughness Characterization using Zeta-20 optical profiler
Surface roughness characterization can be accomplished through multiple surface metrology measurement techniques. This webinar will introduce some techniques for measuring surface roughness, plus typical methods for quantifying the roughness. In addition, we will explore how 3D topography and advanced quantification methods ...
Posted Thursday, June 25, 2020
