26:21
Dr. Jake Polster of KLA Instruments covers the theory behind spectral reflectance measurements and shares some examples of different thicknesses and materials that can be measured using spectral reflectance.
25:53
Dr. Jim Elman, Filmetrics Application Manager at KLA Instruments, discusses techniques and challenges for measuring spectral reflectance on display films.
23:13
Dr. Jim Elman of Filmetrics discusses historical background of display films and how thin film metrology is an important characterization technique throughout the display manufacturing process.
49:41
演讲嘉宾:KLA Instruments 资深应用工程师 - Marco Tsui(中文)
37:15
Strategies and guidelines for determining and using optical constants for accurate measurement of film thickness.
56:55
超过8微米的厚膜会产生很多光干涉条纹。 分析这样复杂光谱的一个简洁方法就是用快速傅里叶变换。 FILMeasure 软件包括一系列高智能方法来简化光谱分析。这包括FFT 窗口功能,波长范围自动优化, 以及光学厚度滤波。我们会讲到光斑尺寸的影响以及设备的选配。 还会讲到多层薄膜的应用。
38:32
Thicker films (>8um) produce a lot of optical fringes. A quick way to sort and measure such complicated spectra is to apply FFT. FILMeasure contains a suite of advanced tools to simply this analysis including: FFT Window Function, intelligent selection of wavelength range, and optical smoothing. We’ll also deal with the effects of measurement spot size and instrument selection. Multi-layered...