KLA Instruments offers a broad portfolio of fab and lab solutions for metrology. Fab solutions include HRP®, Tencor® and Zeta™ automated stylus and optical profilers plus the Filmetrics® F60-c automated film thickness mapper. Lab solutions include Filmetrics Thin-Film metrology systems, Profilm3D® optical profilers and R-Series sheet resistance mappers, Alpha-Step®, Tencor and Zeta surface profilers, and a suite of nanoindentation systems, including the Nano Indenter® G200X.
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