KLA Instruments offers a broad portfolio of fab and lab solutions for defect inspection and metrology. Fab solutions include Candela® defect inspection systems as well as HRP®, Tencor™ and Zeta™ automated stylus and optical profilers. Lab solutions include Filmetrics® Thin-Film metrology systems, Profilm3D® optical profilers and R50-Series sheet resistance mappers, Alpha-Step®, Tencor and Zeta surface profilers, and a suite of nanoindentation systems, including the Nano Indenter® G200X.
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