KLA Instruments Webinars

Profilm3D : Measuring step heights with white light interferometry

Tuesday, October 20, 2020

The first foray into the vast number of applications that optical profilometers serve; measuring step heights (coating thickness, etch depth, etc.). We will cover basic topics such as: sample preparation, best practices for data acquisition, and various methods for calculating a step height. We will also discuss transparent films and step heights for different materials, including metals.