KLA Instruments Webinars

Name: Spot Size and Lateral Resolution of Sheet Resistance Measurements
Uploaded: 2021-10-20T13:19:04-04:00
Duration: PT1830.76S
Description: Walt Johnson of KLA Instruments discussed the importance of spot size and 4PP pin spacing to edge exclusion and lateral resolution.

October 20, 2021

Walt Johnson of KLA Instruments discussed the importance of spot size and 4PP pin spacing to edge exclusion and lateral resolution.

Tags: KLA Instrument webinars, Sheet Resistance, Semiconductor

KLA Instruments Webinars

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Spot Size and Lateral Resolution of Sheet Resistance Measurements

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