Wednesday, August 31, 2022
Professor Owen J. Guy of Swansea University and Dr. Michael Grimes of KLA discuss the application of molecular vapour deposition (MVD) to real world applications. Dr. Grimes presents an overview of the MVD process, and Professor Guy presents his latest research using MVD for low temperature AL2O3 high k dielectrics, Al2O3 as anode passivation in battery cells, FDTS for nanoimprint, low temperature transparent conductive oxides (TCOs, including AZO), and (platinum) metal deposition.
