KLA Instruments Webinars

Wavelength selection, film thickness range and goodness of fit

Tuesday, July 14, 2020

Let us consider the interaction of light source, spectrometer resolution, spot size, and numerical aperture of system optics as we attempt to measure films from angstroms to millimeters. It will be assumed for this webinar that the refractive indices are well established for the considered films. To finish off we’ll answer the very popular question: “how good does my GOF have to be?”