KLA Instruments Webinars

Indentation University - Session 11: Nanoindentation of Thin Films

Wednesday, February 12, 2020

Substrate influence is a common problem when using nanoindentation to evaluate the elastic modulus of thin films. In this session, an elastic model for film-substrate interaction is presented which returns accurate film moduli even when substrate influence is substantial. The new model is applied to the interpretation of nanoindentation data on various thin films, including low-k films on silicon.