KLA Instruments Webinars

Indentation University - Session 9: Frame Stiffness and Tip Area Function

Tuesday, January 7, 2020

Two nanoindentation calibrations are accomplished by means of indentation experiments on a reference material. These are the load-frame stiffness calibration, which quantifies the expected flexure in the test equipment, and the area-function calibration, which quantifies the precise shape of the indenter. This presentation explains how these calibrations affect nanoindentation analysis, and how the calibrations are accomplished.