KLA Instruments Webinars

Analysis by Fast Fourier Transform: your friend for thick films

Tuesday, August 11, 2020

Thicker films (>8um) produce a lot of optical fringes. A quick way to sort and measure such complicated spectra is to apply FFT. FILMeasure contains a suite of advanced tools to simply this analysis including: FFT Window Function, intelligent selection of wavelength range, and optical smoothing. We’ll also deal with the effects of measurement spot size and instrument selection. Multi-layered systems will also be considered.